Material properties and process technologies of platinum silicide relevant to VLSI applications

Material properties and process technologies of platinum silicide relevant to VLSI applications

碩士 === 國立交通大學 === 電子研究所 === 80 ===

Bibliographic Details
Main Authors:	Cui, Bing-Yue, 崔秉鉞
Other Authors:	Chen, Mao-Jie
Format:	Others
Language:	zh-TW
Published:	1992
Online Access:	http://ndltd.ncl.edu.tw/handle/60420918202344728346

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