Study of silicided shallow junctions in ULSI circuits

博士 === 國立交通大學 === 電子研究所 === 80 ===

Bibliographic Details
Main Authors:	Zhuang, Min-Hong, 莊敏宏
Other Authors:	Zheng, Huang-Zhong
Format:	Others
Language:	zh-TW
Published:	1992
Online Access:	http://ndltd.ncl.edu.tw/handle/87561714918991699374

id	ndltd-TW-080NCTU4430006
record_format	oai_dc
spelling	ndltd-TW-080NCTU44300062015-10-13T14:20:24Z http://ndltd.ncl.edu.tw/handle/87561714918991699374 Study of silicided shallow junctions in ULSI circuits 極大型積體電路矽化淺接面之研究 Zhuang, Min-Hong 莊敏宏博士國立交通大學電子研究所 80 Zheng, Huang-Zhong 鄭晃忠 1992 學位論文 ; thesis 238 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	博士 === 國立交通大學 === 電子研究所 === 80 ===
author2	Zheng, Huang-Zhong
author_facet	Zheng, Huang-Zhong Zhuang, Min-Hong 莊敏宏
author	Zhuang, Min-Hong 莊敏宏
spellingShingle	Zhuang, Min-Hong 莊敏宏 Study of silicided shallow junctions in ULSI circuits
author_sort	Zhuang, Min-Hong
title	Study of silicided shallow junctions in ULSI circuits
title_short	Study of silicided shallow junctions in ULSI circuits
title_full	Study of silicided shallow junctions in ULSI circuits
title_fullStr	Study of silicided shallow junctions in ULSI circuits
title_full_unstemmed	Study of silicided shallow junctions in ULSI circuits
title_sort	study of silicided shallow junctions in ulsi circuits
publishDate	1992
url	http://ndltd.ncl.edu.tw/handle/87561714918991699374
work_keys_str_mv	AT zhuangminhong studyofsilicidedshallowjunctionsinulsicircuits AT zhuāngmǐnhóng studyofsilicidedshallowjunctionsinulsicircuits AT zhuangminhong jídàxíngjītǐdiànlùxìhuàqiǎnjiēmiànzhīyánjiū AT zhuāngmǐnhóng jídàxíngjītǐdiànlùxìhuàqiǎnjiēmiànzhīyánjiū
_version_	1717751856868884480

Study of silicided shallow junctions in ULSI circuits

Similar Items