Synthesis of silicon film by glow discharge deposition at room temperature

碩士 === 大同工學院 === 材料工程研究所 === 80 ===

Bibliographic Details
Main Authors:	CHUANG, TE-AN, 莊德安
Other Authors:	CHEN, PEI-LI
Format:	Others
Language:	zh-TW
Published:	1992
Online Access:	http://ndltd.ncl.edu.tw/handle/87652070987972657770

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spelling	ndltd-TW-080TTIT21590232016-07-25T04:07:01Z http://ndltd.ncl.edu.tw/handle/87652070987972657770 Synthesis of silicon film by glow discharge deposition at room temperature 室溫下以輝光放電沈積法合成矽薄膜 CHUANG, TE-AN 莊德安碩士大同工學院材料工程研究所 80 CHEN, PEI-LI 陳培麗 1992 學位論文 ; thesis 52 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 大同工學院 === 材料工程研究所 === 80 ===
author2	CHEN, PEI-LI
author_facet	CHEN, PEI-LI CHUANG, TE-AN 莊德安
author	CHUANG, TE-AN 莊德安
spellingShingle	CHUANG, TE-AN 莊德安 Synthesis of silicon film by glow discharge deposition at room temperature
author_sort	CHUANG, TE-AN
title	Synthesis of silicon film by glow discharge deposition at room temperature
title_short	Synthesis of silicon film by glow discharge deposition at room temperature
title_full	Synthesis of silicon film by glow discharge deposition at room temperature
title_fullStr	Synthesis of silicon film by glow discharge deposition at room temperature
title_full_unstemmed	Synthesis of silicon film by glow discharge deposition at room temperature
title_sort	synthesis of silicon film by glow discharge deposition at room temperature
publishDate	1992
url	http://ndltd.ncl.edu.tw/handle/87652070987972657770
work_keys_str_mv	AT chuangtean synthesisofsiliconfilmbyglowdischargedepositionatroomtemperature AT zhuāngdéān synthesisofsiliconfilmbyglowdischargedepositionatroomtemperature AT chuangtean shìwēnxiàyǐhuīguāngfàngdiànchénjīfǎhéchéngxìbáomó AT zhuāngdéān shìwēnxiàyǐhuīguāngfàngdiànchénjīfǎhéchéngxìbáomó
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Synthesis of silicon film by glow discharge deposition at room temperature

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