The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films

The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films

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碩士 === 國立清華大學 === 物理研究所 === 81 ===

Bibliographic Details
Main Authors: Chen,Chi Lin, 陳麒麟
Other Authors: Lue,Juh Tzeng
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/11199240569932574254
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spelling ndltd-TW-081NTHU01980242016-07-20T04:11:47Z http://ndltd.ncl.edu.tw/handle/11199240569932574254 The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films 利用射頻電漿化學氣相沉積法(RFCVD)在矽基材上沉積類鑽石膜及非晶質碳氫薄膜 Chen,Chi Lin 陳麒麟 碩士 國立清華大學 物理研究所 81 Lue,Juh Tzeng 呂助增 學位論文 ; thesis 0 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 物理研究所 === 81 ===
author2 Lue,Juh Tzeng
author_facet Lue,Juh Tzeng
Chen,Chi Lin
陳麒麟
author Chen,Chi Lin
陳麒麟
spellingShingle Chen,Chi Lin
陳麒麟
The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films
author_sort Chen,Chi Lin
title The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films
title_short The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films
title_full The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films
title_fullStr The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films
title_full_unstemmed The Deposition and Study of Amorphous Hydrogenated Carbon Films and Diamond Like Films
title_sort deposition and study of amorphous hydrogenated carbon films and diamond like films
url http://ndltd.ncl.edu.tw/handle/11199240569932574254
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