The material properties of hydrogenated amorphous silicon carbide characterized by silicon implantation
碩士 === 國立臺灣大學 === 電機工程研究所 === 81 ===
Main Authors: | LIN, JUN-ZHONG, 林俊仲 |
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Other Authors: | LI, SI-CEN |
Format: | Others |
Language: | zh-TW |
Published: |
1993
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Online Access: | http://ndltd.ncl.edu.tw/handle/44013486175722672833 |
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