Effects of Plasma Surface Modification TiN Implantation on Ti
碩士 === 大同工學院 === 材料科學(工程)研究所 === 81 === This research applied three kinds of different physical vapor deposition processes, namely, electron-beam evaporation, hollow cathode deposition and cathode arc plasma deposition for titanium nitride films coating o...
Main Authors: | Ter-Ming Chan, 陳德明 |
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Other Authors: | Shen-Chih Lee |
Format: | Others |
Language: | zh-TW |
Published: |
1993
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Online Access: | http://ndltd.ncl.edu.tw/handle/91252171792767808364 |
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