Formation of the Novel Capacitor with Rugged Polycrystalline Silicon Films
碩士 === 國立交通大學 === 應用化學系 === 82 === For the down-scaling of DRAM cells, an advanced storage capacitor structure is required to provide sufficiently large capacitance in a limited area.Many researches have been reported to meet the re...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95359551892238537480 |