Selective Epitaxial Growth of Compound Semiconductors Using Low- Pressure Metalorganic Chemical Vapor Deposition
博士 === 國立交通大學 === 電子研究所 === 83 === We have done experimebtal studies on the epitaxial growth and selective epitaxial growth ( SEG ) of GaInP by low-pressure metalorganic chemical vapor deposition ( LP-MOCVD ) using ethyldimethylindium ( EDMI ), trimethyli...
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| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73212114898589007465 |