Growth of ALN Films by Reactive RF Sputtering
碩士 === 國立中山大學 === 電機工程研究所 === 83 === C-axis oriented aluminum nitride (AlN) thin films on different substrates, such as Corning glass, Si(100), GaAs(100), LiNbO3, SiO2/Si(100), are prepared by reactive RF magnetron sputtering The dependence of highly c-...
Main Authors: | Wang, Horng Jwo, 王宏灼 |
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Other Authors: | Chen, Ying Chung |
Format: | Others |
Language: | zh-TW |
Published: |
1995
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Online Access: | http://ndltd.ncl.edu.tw/handle/69354251443050827144 |
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