Automatic Parameter Extraction of Fully-Depleted SOI MOSFETs

• Main Authors: Ho, Ming Yo, 何明佑
• Other Authors: Lin, Jyi Tsong
• Format: Others
• Language: zh-TW
• Published: 1995
• Online Access: http://ndltd.ncl.edu.tw/handle/61214685343165263682

碩士 === 國立中山大學 === 電機工程研究所 === 83 === To extract parameters of fully-depleted SOI MOSFETs devices is my purpose in this thesis for master. These extracted parameters can be used in two things, one is to simulate the circuit design- ed in circuit simulator, such as SPICE. The other is to evaluate that process parameters is good or not. Because the SOI MOSFETs have two gates to control device behavior , it is more difficult to extract parameters in SOI MOSFETs than bulk MOSFETs. We have to consider that coupling effect between two surfaces in SOI MOSFETs, so do shielding effect between two channels in SOI MOSFETs. In principle, we divided parameters extraction into several parts to do, (1)In Fibd and fdBI modes, the current expressions in lin- ear region and saturation must be deduced firstly. (2)Using three -point measure technique in linear region to extract parameters, we utiliz iteration method to decide parameters in saturation region by three data points. (3)We can decide the parameters wan- ted from relationship of device parameters and model paraters. (4)To combine the expressions of model parameters and model equa- tions into a equation system, then we solve this equation system to get some parameters which are not derived directly. We use 19 data points in the input characteristic curve and outp- ut characteristic curve of SOI MOSFETs, 24 parameters are extrac- ted, both of devices parameters and model parameters are included .These parameters include threshold voltage in front and back su- rfaces, maximum saturation velocity, mobility in low field, and mobility degradation factor of front channel and back channel ca- rriers,...etc. By comparing the extracted parameters and setted parameters in model, we can result this parameter extraction algorithm has a good precision, and it has high efficiency for a short extraction time.