The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===
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| Format: | Others |
| Language: | zh-TW |
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1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46273225601576268395 |
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ndltd-TW-083NTHU0159023 |
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oai_dc |
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ndltd-TW-083NTHU01590232015-10-13T12:26:20Z http://ndltd.ncl.edu.tw/handle/46273225601576268395 The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film 濺鍍鋁膜應力行為之探討 Lee, Ting-chi 李庭芝 碩士 國立清華大學 材料科學(工程)研究所 83 Jou,Jwo-Huei 周卓煇 1994 學位論文 ; thesis 0 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===
|
| author2 |
Jou,Jwo-Huei |
| author_facet |
Jou,Jwo-Huei Lee, Ting-chi 李庭芝 |
| author |
Lee, Ting-chi 李庭芝 |
| spellingShingle |
Lee, Ting-chi 李庭芝 The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
| author_sort |
Lee, Ting-chi |
| title |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
| title_short |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
| title_full |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
| title_fullStr |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
| title_full_unstemmed |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
| title_sort |
investigation of the stress behavior of sputter deposited al thin film |
| publishDate |
1994 |
| url |
http://ndltd.ncl.edu.tw/handle/46273225601576268395 |
| work_keys_str_mv |
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| _version_ |
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