The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===
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1994
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Online Access: | http://ndltd.ncl.edu.tw/handle/46273225601576268395 |
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ndltd-TW-083NTHU01590232015-10-13T12:26:20Z http://ndltd.ncl.edu.tw/handle/46273225601576268395 The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film 濺鍍鋁膜應力行為之探討 Lee, Ting-chi 李庭芝 碩士 國立清華大學 材料科學(工程)研究所 83 Jou,Jwo-Huei 周卓煇 1994 學位論文 ; thesis 0 zh-TW |
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NDLTD |
language |
zh-TW |
format |
Others
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sources |
NDLTD |
description |
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===
|
author2 |
Jou,Jwo-Huei |
author_facet |
Jou,Jwo-Huei Lee, Ting-chi 李庭芝 |
author |
Lee, Ting-chi 李庭芝 |
spellingShingle |
Lee, Ting-chi 李庭芝 The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
author_sort |
Lee, Ting-chi |
title |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
title_short |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
title_full |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
title_fullStr |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
title_full_unstemmed |
The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film |
title_sort |
investigation of the stress behavior of sputter deposited al thin film |
publishDate |
1994 |
url |
http://ndltd.ncl.edu.tw/handle/46273225601576268395 |
work_keys_str_mv |
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