The Investigation of The Stress Behavior of Sputter Deposited Al Thin Film
碩士 === 國立清華大學 === 材料科學(工程)研究所 === 83 ===
Main Authors: | Lee, Ting-chi, 李庭芝 |
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Other Authors: | Jou,Jwo-Huei |
Format: | Others |
Language: | zh-TW |
Published: |
1994
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Online Access: | http://ndltd.ncl.edu.tw/handle/46273225601576268395 |
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