Electrical reliability of in-situ boron-doped polycrystalline diamond films by hot filament chamical vapor deposition

碩士 === 國立清華大學 === 材料科學工程研究所 === 83 ===

Bibliographic Details
Main Authors: WANG, BO LANG, 王博琅
Other Authors: HUANG, ZHEN CHANG
Format: Others
Language:zh-TW
Published: 1995
Online Access:http://ndltd.ncl.edu.tw/handle/47856657377043446113