Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration

Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration

碩士 === 國立交通大學 === 材料科學與工程研究所 === 84 ===

Bibliographic Details
Main Authors: Lin, Chi-Fa, 林啟發
Other Authors: Ming-Shiann Feng
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/36445367225735983676
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spelling ndltd-TW-084NCTU01590122016-02-05T04:16:33Z http://ndltd.ncl.edu.tw/handle/36445367225735983676 Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration 電漿輔助化學氣相沉積之介電質在化學機械研磨中特性與製程整合之研究 Lin, Chi-Fa 林啟發 碩士 國立交通大學 材料科學與工程研究所 84 Ming-Shiann Feng 馮明憲 1996 學位論文 ; thesis 44 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 材料科學與工程研究所 === 84 ===
author2 Ming-Shiann Feng
author_facet Ming-Shiann Feng
Lin, Chi-Fa
林啟發
author Lin, Chi-Fa
林啟發
spellingShingle Lin, Chi-Fa
林啟發
Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration
author_sort Lin, Chi-Fa
title Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration
title_short Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration
title_full Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration
title_fullStr Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration
title_full_unstemmed Chemical Mechanical Polishing of PECVD Dielectrics: Characterization and Process Integration
title_sort chemical mechanical polishing of pecvd dielectrics: characterization and process integration
publishDate 1996
url http://ndltd.ncl.edu.tw/handle/36445367225735983676
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