Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration

Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration

碩士 === 國立交通大學 === 材料科學工程研究所 === 84 ===

Bibliographic Details
Main Authors: Lin, Qi-Fa, 林啟發
Other Authors: Ping, Ming-Xian
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/08396109180397390113
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spelling ndltd-TW-084NCTU40580042016-06-13T04:16:46Z http://ndltd.ncl.edu.tw/handle/08396109180397390113 Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration Lin, Qi-Fa 林啟發 碩士 國立交通大學 材料科學工程研究所 84 Ping, Ming-Xian Dai, Bao-Tong 馮明憲 戴寶通 1996 學位論文 ; thesis 44 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 材料科學工程研究所 === 84 ===
author2 Ping, Ming-Xian
author_facet Ping, Ming-Xian
Lin, Qi-Fa
林啟發
author Lin, Qi-Fa
林啟發
spellingShingle Lin, Qi-Fa
林啟發
Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration
author_sort Lin, Qi-Fa
title Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration
title_short Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration
title_full Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration
title_fullStr Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration
title_full_unstemmed Chemical Mechanical Polishing of PECVD Dielectrics：Characterization and Processs Integration
title_sort chemical mechanical polishing of pecvd dielectrics：characterization and processs integration
publishDate 1996
url http://ndltd.ncl.edu.tw/handle/08396109180397390113
work_keys_str_mv AT linqifa chemicalmechanicalpolishingofpecvddielectricscharacterizationandprocesssintegration
AT línqǐfā chemicalmechanicalpolishingofpecvddielectricscharacterizationandprocesssintegration
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