Design and fabricate ARROW-type waveguides to characterize SiOx and Ta2O5 thin films
碩士 === 國立中山大學 === 光電(科學)研究所 === 84 === A novel material system using SiOx/Ta2O5/SiO2 deposited on Si substrate was proposed for the fabrication of the athermal waveguide. The SiOx and Ta2O5 thin films were grown by using RF magnetron sputte...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43559456835981771367 |