A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta

A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===

Bibliographic Details
Main Authors:	Cheng, Chao Chen, 鄭兆禎
Other Authors:	Tai-Bor Wu; Jon-Yiew Gan
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/94421520529794908668

Description
Summary:	碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===