A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===

Bibliographic Details
Main Authors:	Cheng, Chao Chen, 鄭兆禎
Other Authors:	Tai-Bor Wu; Jon-Yiew Gan
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/94421520529794908668

id	ndltd-TW-084NTHU0159025
record_format	oai_dc
spelling	ndltd-TW-084NTHU01590252016-07-13T04:10:34Z http://ndltd.ncl.edu.tw/handle/94421520529794908668 A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta 鎳酸鑭與鉭共濺度之移相式光罩薄膜研究 Cheng, Chao Chen 鄭兆禎碩士國立清華大學材料科學(工程)研究所 84 Tai-Bor Wu; Jon-Yiew Gan 吳泰伯; 甘炯耀 1996 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===
author2	Tai-Bor Wu; Jon-Yiew Gan
author_facet	Tai-Bor Wu; Jon-Yiew Gan Cheng, Chao Chen 鄭兆禎
author	Cheng, Chao Chen 鄭兆禎
spellingShingle	Cheng, Chao Chen 鄭兆禎 A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta
author_sort	Cheng, Chao Chen
title	A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta
title_short	A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta
title_full	A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta
title_fullStr	A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta
title_full_unstemmed	A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta
title_sort	study of attenuated phase-shifting mask film cosputtered by lanio3 and ta
publishDate	1996
url	http://ndltd.ncl.edu.tw/handle/94421520529794908668
work_keys_str_mv	AT chengchaochen astudyofattenuatedphaseshiftingmaskfilmcosputteredbylanio3andta AT zhèngzhàozhēn astudyofattenuatedphaseshiftingmaskfilmcosputteredbylanio3andta AT chengchaochen nièsuānlànyǔtǎngòngjiàndùzhīyíxiāngshìguāngzhàobáomóyánjiū AT zhèngzhàozhēn nièsuānlànyǔtǎngòngjiàndùzhīyíxiāngshìguāngzhàobáomóyánjiū AT chengchaochen studyofattenuatedphaseshiftingmaskfilmcosputteredbylanio3andta AT zhèngzhàozhēn studyofattenuatedphaseshiftingmaskfilmcosputteredbylanio3andta
_version_	1718344886192701440

A study of attenuated phase-shifting mask film cosputtered by LaNiO3 and Ta

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