Failure and Life Time Analysis of Susceptors Used in RIE

碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===

Bibliographic Details
Main Authors:	Lin, Ray Phone, 林瑞烽
Other Authors:	Chang, Yee Shyi
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/08667972918072562269

id	ndltd-TW-084NTHU0159053
record_format	oai_dc
spelling	ndltd-TW-084NTHU01590532016-07-13T04:10:34Z http://ndltd.ncl.edu.tw/handle/08667972918072562269 Failure and Life Time Analysis of Susceptors Used in RIE 電漿蝕刻設備基座破壞分析與壽命研究 Lin, Ray Phone 林瑞烽碩士國立清華大學材料科學(工程)研究所 84 Chang, Yee Shyi 張一熙 1996 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 材料科學(工程)研究所 === 84 ===
author2	Chang, Yee Shyi
author_facet	Chang, Yee Shyi Lin, Ray Phone 林瑞烽
author	Lin, Ray Phone 林瑞烽
spellingShingle	Lin, Ray Phone 林瑞烽 Failure and Life Time Analysis of Susceptors Used in RIE
author_sort	Lin, Ray Phone
title	Failure and Life Time Analysis of Susceptors Used in RIE
title_short	Failure and Life Time Analysis of Susceptors Used in RIE
title_full	Failure and Life Time Analysis of Susceptors Used in RIE
title_fullStr	Failure and Life Time Analysis of Susceptors Used in RIE
title_full_unstemmed	Failure and Life Time Analysis of Susceptors Used in RIE
title_sort	failure and life time analysis of susceptors used in rie
publishDate	1996
url	http://ndltd.ncl.edu.tw/handle/08667972918072562269
work_keys_str_mv	AT linrayphone failureandlifetimeanalysisofsusceptorsusedinrie AT línruìfēng failureandlifetimeanalysisofsusceptorsusedinrie AT linrayphone diànjiāngshíkèshèbèijīzuòpòhuàifēnxīyǔshòumìngyánjiū AT línruìfēng diànjiāngshíkèshèbèijīzuòpòhuàifēnxīyǔshòumìngyánjiū
_version_	1718344899279978496

Failure and Life Time Analysis of Susceptors Used in RIE

Similar Items