Study of application of LPCVD TiN on shallow junction

Study of application of LPCVD TiN on shallow junction

碩士 === 國立清華大學 === 物理研究所 === 84 ===

Bibliographic Details
Main Authors: Jiann-heng Chen, 陳建亨
Other Authors: Fon-shan Huang , Ying-chuan Yang
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/86308912934649069176
Description
Summary:碩士 === 國立清華大學 === 物理研究所 === 84 ===

Similar Items