Study of application of LPCVD TiN on shallow junction
碩士 === 國立清華大學 === 物理研究所 === 84 ===
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1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86308912934649069176 |
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ndltd-TW-084NTHU0198029 |
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ndltd-TW-084NTHU01980292016-07-13T04:10:34Z http://ndltd.ncl.edu.tw/handle/86308912934649069176 Study of application of LPCVD TiN on shallow junction 低壓化學氣相沉積氮化鈦在淺接面上之應用研究 Jiann-heng Chen 陳建亨 碩士 國立清華大學 物理研究所 84 Fon-shan Huang , Ying-chuan Yang 葉鳳生,楊銀圳 1996 學位論文 ; thesis 0 zh-TW |
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NDLTD |
| language |
zh-TW |
| format |
Others
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| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 物理研究所 === 84 ===
|
| author2 |
Fon-shan Huang , Ying-chuan Yang |
| author_facet |
Fon-shan Huang , Ying-chuan Yang Jiann-heng Chen 陳建亨 |
| author |
Jiann-heng Chen 陳建亨 |
| spellingShingle |
Jiann-heng Chen 陳建亨 Study of application of LPCVD TiN on shallow junction |
| author_sort |
Jiann-heng Chen |
| title |
Study of application of LPCVD TiN on shallow junction |
| title_short |
Study of application of LPCVD TiN on shallow junction |
| title_full |
Study of application of LPCVD TiN on shallow junction |
| title_fullStr |
Study of application of LPCVD TiN on shallow junction |
| title_full_unstemmed |
Study of application of LPCVD TiN on shallow junction |
| title_sort |
study of application of lpcvd tin on shallow junction |
| publishDate |
1996 |
| url |
http://ndltd.ncl.edu.tw/handle/86308912934649069176 |
| work_keys_str_mv |
AT jiannhengchen studyofapplicationoflpcvdtinonshallowjunction AT chénjiànhēng studyofapplicationoflpcvdtinonshallowjunction AT jiannhengchen dīyāhuàxuéqìxiāngchénjīdànhuàtàizàiqiǎnjiēmiànshàngzhīyīngyòngyánjiū AT chénjiànhēng dīyāhuàxuéqìxiāngchénjīdànhuàtàizàiqiǎnjiēmiànshàngzhīyīngyòngyánjiū |
| _version_ |
1718344926471651328 |