Study of application of LPCVD TiN on shallow junction
碩士 === 國立清華大學 === 物理研究所 === 84 ===
Main Authors: | Jiann-heng Chen, 陳建亨 |
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Other Authors: | Fon-shan Huang , Ying-chuan Yang |
Format: | Others |
Language: | zh-TW |
Published: |
1996
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Online Access: | http://ndltd.ncl.edu.tw/handle/86308912934649069176 |
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