Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation
碩士 === 國立清華大學 === 電機工程研究所 === 84 ===
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| Language: | en_US |
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1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01180867006109851139 |
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ndltd-TW-084NTHU0442090 |
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ndltd-TW-084NTHU04420902016-07-13T04:10:35Z http://ndltd.ncl.edu.tw/handle/01180867006109851139 Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation 以微波電漿放電後氧化法在大面積晶片上成長超薄氧化層及其可靠度研究 Chen, Cheng Rong 陳正榮 碩士 國立清華大學 電機工程研究所 84 Hwang Huey Liang 黃惠良 1996 學位論文 ; thesis 0 en_US |
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NDLTD |
| language |
en_US |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 電機工程研究所 === 84 ===
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| author2 |
Hwang Huey Liang |
| author_facet |
Hwang Huey Liang Chen, Cheng Rong 陳正榮 |
| author |
Chen, Cheng Rong 陳正榮 |
| spellingShingle |
Chen, Cheng Rong 陳正榮 Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation |
| author_sort |
Chen, Cheng Rong |
| title |
Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation |
| title_short |
Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation |
| title_full |
Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation |
| title_fullStr |
Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation |
| title_full_unstemmed |
Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation |
| title_sort |
study on the reliability of ultra-thin oxide grown in large diameter silicon wafers by microwave plasma afterglow oxidation |
| publishDate |
1996 |
| url |
http://ndltd.ncl.edu.tw/handle/01180867006109851139 |
| work_keys_str_mv |
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| _version_ |
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