Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation

Study on the Reliability of Ultra-Thin Oxide Grown in Large Diameter Silicon Wafers by Microwave Plasma Afterglow Oxidation

碩士 === 國立清華大學 === 電機工程研究所 === 84 ===

Bibliographic Details
Main Authors:	Chen, Cheng Rong, 陳正榮
Other Authors:	Hwang Huey Liang
Format:	Others
Language:	en_US
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/01180867006109851139

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