超精密加工矽晶圓之變質層分析研究
碩士 === 中正理工學院 === 兵器系統工程研究所 === 85 === This study uses cross-section transmission electron microscope (XTEM), scanning electron microscope (SEM), Fourier-transform infrared spectrometry (FTIR), Auger electron spectroscopy (AES), ellipsometry and atomic force microscope (AFM) to characterize the...
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| Format: | Others |
| Language: | zh-TW |
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1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75606154642354864577 |