Preload-Controlled and Friction Compensation with Ballscrew

• Main Authors: Tuan, Yu-Chiang, 段玉強
• Other Authors: Chen Jenq-Shyong
• Format: Others
• Language: zh-TW
• Published: 1997
• Online Access: http://ndltd.ncl.edu.tw/handle/42505851193249393044

碩士 === 國立中正大學 === 機械工程學系 === 85 === AbstractHigh speed precise positioning is very important technology in industry. To improve accuracy and to increase products, like semiconductor and MEMs technology, high speed precise positioning is used. So the goal of this research is high speed precise positioning.There is a backlash program in ballscrew, so if we want to eliminate backlash and increase stiffness, we get preload to ballscrew. But the preload is high so that the friction is increase. So we design a preload tuning machine to change preload of ballscrew and fine tuning of positioning.The coarse positioning using ballscrew , the controller is used the traditional PID controller and IP control, and the position accuracy is up to 1 mm, and change to piezoactuator to fine tune and the position accuracy is up to 0.1mm.