Low-Temperature Fabricated Polycrystalline Silicon Thin-Film Transistors
博士 === 國立交通大學 === 電子工程學系 === 85 === The increase in the grain size and the deposition of high quality films are commonly carried out to improve the characteristics of polycrystalline silicon (poly-Si) thin film transistors (TFTs). An ultrahigh vacuum chem...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/13707941873360483657 |