Fabrication and Characterization of Micro Meander Type Inductor
碩士 === 國立中山大學 === 材料科學與工程學研究所 === 85 === The fabriction technique of thin film micro inductors becomes more and more important in recently. for improving the qualities of inductors, we enclose cooper lines with high permeability meterial NFM (Ni 77% - Fe 22% - Mo 1%). There are three layers...
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| Format: | Others |
| Language: | en_US |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18619881532079866301 |
| Summary: | 碩士 === 國立中山大學 === 材料科學與工程學研究所 === 85 ===
The fabriction technique of thin film micro inductors becomes more and more important in recently. for improving the qualities of inductors, we enclose cooper lines with high permeability meterial NFM (Ni 77% - Fe 22% - Mo 1%).
There are three layers in our fabrication processes. All of the three thin films are growth by sputtering system. The etching conditions of NFM and Cu were experimentally investigated. Micro meander type inductors having 100000 mm length were fabricated successfully.
Finally, we measure our devices with RLC meter. The inductance of the inductor is 19.26 nH at 940 MHz.
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