The Study Of(BaSr)Ti03 Thin Films Deposited On LaNio3 Electrode By rf Magnetron Sputtering For DRAMs Applications

The Study Of(BaSr)Ti03 Thin Films Deposited On LaNio3 Electrode By rf Magnetron Sputtering For DRAMs Applications

博士 === 國立清華大學 === 材料科學與工程學研究所 === 85 ===

Bibliographic Details
Main Author:	吳啟明
Other Authors:	Perng, Tsong-Pyng
Format:	Others
Language:	zh-TW
Published:	1997
Online Access:	http://ndltd.ncl.edu.tw/handle/15649143677340798064

Similar Items

The Study of Ba(Zr,Ti)O3 Thin Film Deposited on LaNiO3 Electrode by rf Magnetron Sputtering for DRAMs Applications
by: Hsiou-Jeng Shy, et al.
Published: (1999)

The Study of Ba(Zr,Ti)O3 Thin Films Deposited on LaNiO3 electrode by RF Magnetron Sputtering for microwave varactors
by: 劉恒睿
Published: (2003)

Characterization of epitaxial Ba<0.48>Sr<0.52>TiO<3>/LaNiO<3> artificial superlattices prepared by RF magnetron sputtering
by: 巫坤福
Published: (2005)

The study of high dielectric (Ba,Sr)TiO3 thin film deposited by rf magnetron co-sputtering
by: Lai Chun-Hsi, et al.
Published: (1999)

Syntheses and studies on Mg-doped r.f. magnetron sputtered Ba0.3Sr0.7TiO3 thin films
by: Chen-Chun Lin, et al.
Published: (2003)

Electrical and Optical Characterizations of NiO Thin Film by RF Magnetron Sputtering
by: Jer-Shien Yang, et al.
Published: (2001)

Electrochromic Properties of Li- Doped NiO Films Prepared by RF Magnetron Sputtering
by: Jui-Yang Chang, et al.
Published: (2020-01-01)

Characteristics of (Pb,Ba)ZrO3 Thin Film Varactors Deposited by RF-Magnetron Sputtering
by: Wu Lin-Jung, et al.
Published: (2007)

A Rearch on (Ba,Sr)TiO3 Electrodes for DRAM Applications
by: Luh Huei Wu, et al.
Published: (1999)

High Dielectric-Constant Barium Strontium Titanate Films Deposited with RF Magnetron Co-Sputter at Low Substrate Temperatures for DRAM Storage Capacitors
by: Chuan-Chou Hwang, et al.
Published: (2001)

Study on the Preparation and Luminescent Properties of BaSr2Si3O9: Eu3+, Dy3+ Phosphors
by: Tsai-Yun Ou Yang, et al.
Published: (2014)

RF magnetron sputter deposition and electrical properties of La and Y doped SrTiO3 epitaxial films
by: Chen-Yuan Guo, et al.
Published: (2019-10-01)

Multi gas barrier film deposited by RF magnetron sputtering system
by: Hsiao-Lun Chen, et al.
Published: (2019)

Investigation of Co-doped PZT films deposited by rf-magnetron sputtering
by: Felicia Gheorghiu, et al.
Published: (2014-09-01)

Deposition of ITD thin films on acrylic substrates by RF magnetron sputtering
by: XIE, SHO-DA, et al.
Published: (1992)

Deposition of AlN films by RF magnetron sputtering for SAW application.
by: Wei-Lun Chien, et al.
Published: (2003)

optical properties of the Zinc Oxide nanocolumn deposited by RF magnetron sputter
by: Che-Wei Wu, et al.
Published: (2012)

The investigation of Titanium dioxide films deposited by R.F. magnetron sputtering
by: Hong Zhi-Yong, et al.
Published: (1998)

Preparation of Photocatalytic Tantalum Oxide Films by RF Magnetron Sputter Deposition
by: Yi-jung Ko, et al.
Published: (2008)

Electrochromism in Infrared of R.F Magnetron Sputter Deposited Tungsten Oxide
by: ChiaWen Chang, et al.
Published: (2001)

PMT thin films deposited on Si wafers by RF-magnetron sputtering
by: Tsung-Yu Lee, et al.
Published: (1995)

The Properties of Conductive BaPbO3 Films and Ferroelectric (Pb,Ba)ZrO3 Films Deposited by RF-Magnetron Sputtering
by: Luo Yih-Rong, et al.
Published: (2002)

Fabrication and Characterization of BaTiO3 film prepared by RF magnetron sputtering
by: Cheng-Hui Wu, et al.
Published: (2010)

Studing on (Ba,Sr)TiO3 thin film by RF magnetron sputtreing
by: Jyun-Shiou Dung, et al.
Published: (1995)

(Ba,Sr)TiO3 Thin Films Fabricated by Multi Target Co-Sputtering for DRAM Application
by: Sheu, Jeng-Jiing, et al.
Published: (1998)

(Ba,Sr)TiO3 Thin Films Fabricated by Multi Target Co-Sputtering for DRAM Application
by: Xu, Zheng-Jing, et al.
Published: (1998)

Characteristics of transparent conductive AZO films deposited by RF reactive magnetron sputtering
by: Yi-Chen Tsai, et al.

RF magnetron sputter deposition of BiCuSeO epitaxial films
by: Mei-ChingHuang, et al.
Published: (2018)

Discussion on deposition of multi-alloy thermoelectric thin films by RF magnetron sputtering
by: SHEN ,Chun-hung, et al.
Published: (2019)

Fabrication and Characterization of LSGM Electrolyte Thin Film Deposited by RF Magnetron Sputtering
by: Yi-Xuan Hu, et al.
Published: (2014)

RF/DC Magnetron Sputtering Deposition of Thin Layers for Solar Cell Fabrication
by: Slawomir Gulkowski, et al.
Published: (2020-08-01)

Deposition of Ceramic Thin Films on Surgical Blade by R.F. Magnetron Sputtering
by: 吳明洲
Published: (2003)

Photocatalytic TiO2 films deposited by RF reactive magnetron sputtering
by: Wei-Pin Li, et al.
Published: (2009)

Study on photocatalytic properties of perovskite thin films by RF magnetron sputtering deposition
by: Ping-YenChen, et al.
Published: (2010)

The Structural and Electrochromic Properties of Molybdenum Trioxide Films Deposited by RF Magnetron Sputtering
by: Yin-ChanHuang, et al.
Published: (2010)

Depositing the Carbon Nanoflakes by RF Magnetron Sputtering for Electron Field Emission Application
by: Wei-Yao Chen, et al.
Published: (2012)

The properties of Sc-doped ZnO films deposited by RF magnetron sputtering.
by: 黃妤家
Published: (2006)

The Study of BZT Thin Film Deposited on ITO Substrate by RF Magnetron Sputtering
by: Ping-kuan Chang, et al.
Published: (2006)

A Study of Zinc Titanate Thin Films Deposited by RF Magnetron Sputtering
by: Yen-Lin Huang, et al.
Published: (2009)

A Study of Zinc Titanate Thin Films Deposited by RF Magnetron Sputtering
by: Yen-Lin Huang, et al.

Cannot write session to /tmp/vufind_sessions/sess_4cbi1mqclrpr5ejhshkoi1v1ru