An information system design for alignment process monitoring
碩士 === 國立臺灣大學 === 工業工程學研究所 === 85 === The thesis is to develop a process monitoring system by integrating steppers, metrology data, and knowledge from process engineers. In the thesis, we construct an information system for alignment process monitoring. T...
Main Authors: | WANG, SHIH-WEI, 王士維 |
---|---|
Other Authors: | YON-CHUN CHOU |
Format: | Others |
Language: | zh-TW |
Published: |
1997
|
Online Access: | http://ndltd.ncl.edu.tw/handle/94018518404605534096 |
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