A Preliminary Study on Wafer Temperature Distribution in a Thermal Oxidation Furnace
碩士 === 國立臺灣大學 === 機械工程學系 === 85 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36727730385647665226 |