Study of Preparation of PLT Thin Film and Properties of Electrode

Study of Preparation of PLT Thin Film and Properties of Electrode

碩士 === 國立成功大學 === 材料科學(工程)學系 === 86 === RF magnetron sputtering deposition of LaNiO3 conductive thin film on N-type Si wafer and Platinium electrode was studied. Properties of the thin film under difference deposition condition, including d...

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Bibliographic Details
Main Authors:	Wong, Tze-Sheong, 黃志雄
Other Authors:	Wu Nan-Chung
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/93043208395576420549

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