Fabrication、Analysis and Research of Three-layer Polysilicon Thermal Microactuators and Micro Sliding System
碩士 === 國立交通大學 === 電機與控制工程學系 === 86 === This research describes a MEMS sliding device that can be used for position control of optical devices. This MEMS device consists of actuator, sensor and linear sliding block that are fabricated by...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56483145869363804530 |