Microwave Plasma Assisted LPCVD Deposited Titanium Nitride Film
碩士 === 國立清華大學 === 電機工程研究所 === 86 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35960623531256395961 |