Design and Performance of a Deep-UV Stepper
碩士 === 國立臺灣大學 === 機械工程研究所 === 86 ===
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/50639425859774879715 |
| id |
ndltd-TW-086NTU04489001 |
|---|---|
| record_format |
oai_dc |
| spelling |
ndltd-TW-086NTU044890012016-06-15T04:17:27Z http://ndltd.ncl.edu.tw/handle/50639425859774879715 Design and Performance of a Deep-UV Stepper 深紫外光光學微影術晶片步進機之研製 Li, Sheng-Xian 李昇憲 碩士 國立臺灣大學 機械工程研究所 86 Zhang, Suo-Hong 張所鋐 1998 學位論文 ; thesis 176 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立臺灣大學 === 機械工程研究所 === 86 ===
|
| author2 |
Zhang, Suo-Hong |
| author_facet |
Zhang, Suo-Hong Li, Sheng-Xian 李昇憲 |
| author |
Li, Sheng-Xian 李昇憲 |
| spellingShingle |
Li, Sheng-Xian 李昇憲 Design and Performance of a Deep-UV Stepper |
| author_sort |
Li, Sheng-Xian |
| title |
Design and Performance of a Deep-UV Stepper |
| title_short |
Design and Performance of a Deep-UV Stepper |
| title_full |
Design and Performance of a Deep-UV Stepper |
| title_fullStr |
Design and Performance of a Deep-UV Stepper |
| title_full_unstemmed |
Design and Performance of a Deep-UV Stepper |
| title_sort |
design and performance of a deep-uv stepper |
| publishDate |
1998 |
| url |
http://ndltd.ncl.edu.tw/handle/50639425859774879715 |
| work_keys_str_mv |
AT lishengxian designandperformanceofadeepuvstepper AT lǐshēngxiàn designandperformanceofadeepuvstepper AT lishengxian shēnzǐwàiguāngguāngxuéwēiyǐngshùjīngpiànbùjìnjīzhīyánzhì AT lǐshēngxiàn shēnzǐwàiguāngguāngxuéwēiyǐngshùjīngpiànbùjìnjīzhīyánzhì |
| _version_ |
1718305534041391104 |