有機金屬薄膜的結構與氣體感測特性之研究

• Main Author: 蔡文慶
• Other Authors: 楊毓民
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/35689648616918938488

碩士 === 國立成功大學 === 化學工程學系 === 87 === Copper phthalocyanine (CuPc) and tetra-tert-butyle Copper phthalocyanine (ttb-CuPc) were vacuum deposited onto substrates of glass, gold, and electrode to study the effects of substrates materials, substrate temperature and heat treatment on the film structure and the related sensing properties to NO2. The surface morphology and crystal structure are investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD), respectively. The results showed that the growth of CuPc on glass belongs to the island mode. On the other hand, the growth on the gold tends to be the mode of layer by layer growth. When the substrate temperature is elevated above 150℃, the film exhibited a whiskered structure on the gold surface. No specific orientation was found in the stacking axis of the CuPc ring. However, after the heat treatment, the stacking axis oriented to a specific angle respected to the substrate surface. For the ttb-CuPc, the surface morphology become smoother but contained some crack due to the effects of heat treatment. When the substrate was elevated gradually, a fine-grain and then, whiskered morphology were obtained. The effects of heat treatment on the sensing properties of CuPc and ttb-CuPc to NO2 were similar. The films without heat treatment showed an amorphous and fine-grain structure. Due to its looser structure, a higher surface area and thus, higher sensitivity were resulted. However, the recovery time is longer, which is related to the in-diffusion of NO2 into the bulk phase. The ttb-CuPc films had a rapid recovery time, but small sensitivity than that of the CuPc films.