| Summary: | 碩士 === 國立成功大學 === 建築學系 === 87 === Abstract
In recent years , microelectronics has industy vigorously developed in Taiwan , and it pushes Taiwan into the international computer markets with great success. However, there are many problems emerging from high tech industry. The thesis mainly researches one of the most important problems-the effect of environment vibration.
By experimental and analytic efforts, this research attempts to find : (1) The vibration characteristics of a microelectronic plant, (2) Vibration decay from outside to inside a plant. (3)To build a complete structural models and modify it by the experimental data.
From the quick release and forced vibration testings at the third floor of the TSMC plant #6, conclusions can be down as follows:
1. From different quick release locations , verticality was measured. The natural frequency at the first point was about 41 Hz, and the second point 37 Hz. And damping ratio at the first point was about 11%, at the second point was about 8%. From numerical analysis, the first mode frequency from the computer simulation is 37.92 Hz. It matches the experiment result very well.
2. On the vibration decay experiment, it was found that vibration decay from outside to inside the plant was apparently. In the direction of shaker, the decay was about 100 multiple; in the perpendicular direction, the decay was about 10 multiple.
3. The natural frequency of the plants was identified by forced vibration .The natural frequency in short direction was 4.5 Hz , and in long direction was 4.1 Hz . The damping ratio in short direction was about 16 %,in in longer direction was about 10 %. Both showed that dynamic characteristics of high stiffness and damping ratio of a microelectronic plant.
The computer simulation of the whole structure was performed and calibrated by experiments. The natural frequency was 5.69 Hz in short direction and 4.94 Hz in long.
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