The Application of Principal Component Analysis on Multi-Response Optimizing Problems for Copper Chemical and Mechanical Polish Process in Integrated Circuit Fabrication

• Main Authors: Hung-Cheng Chen, 陳宏程
• Other Authors: Lee-Ing Tong
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/72216067036623832821

碩士 === 國立交通大學 === 工業工程與管理系 === 87 === 　　In recent years, optimizing multi-response problems has become an important issue. Many papers have developed various optimization techniques for multi-response problems. However, these techniques are either troublesome for determining the proper weight for each response or too complicated for engineers to use in practice. 　　This study proposes a procedure to optimize the multi-response process based on the principal components analysis(PCA) and technique for order preference by similarity to ideal solution(TOPSIS). The optimal settings of the design parameters for the multi-response problems can be obtained easily and efficiently by the proposed procedure. In addition, engineers can advance their manufacturing knowledge through the optimizing process. The effectiveness of the proposed procedure is demonstrated by a real case provided by an integrated circuits manufacturer in Taiwan.