Verification of Human Computer Interface in Etching Section of a Semiconductor Fab

• Main Authors: Chao-Min Fang, 方兆民
• Other Authors: Shang-Hwa Hsu
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/20354470152016958065

碩士 === 國立交通大學 === 工業工程與管理系 === 87 === The human-computer interface which operators of the semiconductor fab use is very important. If there is any operation error, the consequence will cause a lot of loss. It is necessary to verify the design of interface which operators use in advance to prevent errors for the reason of inadequate design. Then we can get the advice for improvement, and low down the chance of error. This paper makes the detail task analysis of operators in the etching section, and get the relative human factors guidelines to be items of a checklist according to the result of task analysis. Then build the checklist be a tool of verification to verify HCI in fab including task support and Human factor engineering design verification. Definitely, We found much inadequate design in HCI. It means the HCI in Semi Fab need more human factors engineering effort to improve its' design.