The design and fabrication of thin-film components and high-frequency circuits on ceramic substrates.

• Main Authors: Ming-Jie,Yu, 游銘傑
• Other Authors: Yi-Jen,Chan
• Format: Others
• Language: zh-TW
• Published: 1999
• Online Access: http://ndltd.ncl.edu.tw/handle/19271035475511359084

碩士 === 國立中央大學 === 電機工程研究所 === 87 === This thesis focuses on the study of the microwave circuits including the procedure of design, fabrication, and measurement. First of all, the design and development of passive devices including thin-film spiral inductors, MIM capacitors were proceeded, and then the extraction of the equivalent circuit models, and the establishment of the device database for the design of application circuits. After that, we take advantage of the " high resistivity characteristics " of Al2O3 substrates to design devices with improved Q-value such that the energy dissipation of the overall circuits can be minimized. By using the circuits model of thin-film elements that have been established, the design of a 900 MHz and a 1.8 GHz band-pass filter Al2O3 substrates was achieved. Due to the agreement between measurement results and simulation results of the filters, the models of these devices were approved to be highly correct. Finally, based on the support of modeled passive devices and active BJT devices, we design a 900 MHz band-pass amplifier which combines the utilities of both a 900MHz band-pass filter and a narrow-band amplifier. The active devices and thin-film interconnections on the Al2O3 substrates were connected by bonding-wire which can solve the problems of the difficulties to simultaneously fabricate optimized actives and optimized passives on MMICs. Good performance of these circuits can moreover guarantee the feasibility of MIC realization and fabrication.