A Study of Piezoelectric Material of Aerostatic Bearing Via Position Motion Compensation
碩士 === 國立彰化師範大學 === 工業教育學系 === 87 === The piezoelectric material of aerostatic bearing via active positioning motion compensation is studied. Micro-positioning systems using piezoelectric actuators have a very wide range of applications including ultra-precision machine tools. The synergetic integra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63377597622725666506 |