The Fabrication and Characterization of Y-branch Couplers using Antiresonant Reflecting Optical Waveguides
碩士 === 國立中山大學 === 光電工程研究所 === 87 === Abstract SiO2 deep etching for fabricating antiresonant reflecting optical waveguides is presented . The SiO2 layer was etched by reactive ion etching reactor using SF6 and O2 (SF6 : O2 = 40:1) mixture .The etching mask was tested with d...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63941191564139629634 |