Electrochemical deposition Process for ULSI copper interconnect fabrication

碩士 === 國立清華大學 === 化學工程學系 === 87 ===

Bibliographic Details
Main Author:	馮憲平
Other Authors:	C.C.Wan
Format:	Others
Language:	zh-TW
Published:	1999
Online Access:	http://ndltd.ncl.edu.tw/handle/21701027568809907608

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spelling	ndltd-TW-087NTHU00630062016-07-11T04:13:20Z http://ndltd.ncl.edu.tw/handle/21701027568809907608 Electrochemical deposition Process for ULSI copper interconnect fabrication 電化學程序沉積超大型積體電路銅內連線之研究馮憲平碩士國立清華大學化學工程學系 87 C.C.Wan 萬其超 1999 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 化學工程學系 === 87 ===
author2	C.C.Wan
author_facet	C.C.Wan 馮憲平
author	馮憲平
spellingShingle	馮憲平 Electrochemical deposition Process for ULSI copper interconnect fabrication
author_sort	馮憲平
title	Electrochemical deposition Process for ULSI copper interconnect fabrication
title_short	Electrochemical deposition Process for ULSI copper interconnect fabrication
title_full	Electrochemical deposition Process for ULSI copper interconnect fabrication
title_fullStr	Electrochemical deposition Process for ULSI copper interconnect fabrication
title_full_unstemmed	Electrochemical deposition Process for ULSI copper interconnect fabrication
title_sort	electrochemical deposition process for ulsi copper interconnect fabrication
publishDate	1999
url	http://ndltd.ncl.edu.tw/handle/21701027568809907608
work_keys_str_mv	AT féngxiànpíng electrochemicaldepositionprocessforulsicopperinterconnectfabrication AT féngxiànpíng diànhuàxuéchéngxùchénjīchāodàxíngjītǐdiànlùtóngnèiliánxiànzhīyánjiū
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Electrochemical deposition Process for ULSI copper interconnect fabrication

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