MOS Structure Dependence on High Density Plasma Induced Damage in Ultrathin Gate Oxide

MOS Structure Dependence on High Density Plasma Induced Damage in Ultrathin Gate Oxide

碩士 === 國立清華大學 === 工程與系統科學系 === 87 ===

Bibliographic Details
Main Authors:	Jienn-Horng Liu, 劉建宏
Other Authors:	Kuei-Shu Chang-Liao
Format:	Others
Language:	zh-TW
Published:	1999
Online Access:	http://ndltd.ncl.edu.tw/handle/37261148547590299718

Description
Summary:	碩士 === 國立清華大學 === 工程與系統科學系 === 87 ===