MOS Structure Dependence on High Density Plasma Induced Damage in Ultrathin Gate Oxide
碩士 === 國立清華大學 === 工程與系統科學系 === 87 ===
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1999
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Online Access: | http://ndltd.ncl.edu.tw/handle/37261148547590299718 |