鋅銦氧化薄膜氣體感測器之研究
碩士 === 國立成功大學 === 化學工程研究所 === 88 === Thin film gas sensor of multicomponent oxides posser better sensitivity than that of single component oxide. It has been intensively studied and widely applied. In the study, the ZnO and In2O3 thin films were prepared by vacuum deposition following with ther...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/05905868542384344957 |