Dynamic Analysis, Control and Experimental Investigation of Piezoelectric Actuator for Micro Positioning Systems

• Main Authors: Wen-Yung Liang, 梁文勇
• Other Authors: Yi-Cheng Huang
• Format: Others
• Language: zh-TW
• Published: 2000
• Online Access: http://ndltd.ncl.edu.tw/handle/73409504110826343216

碩士 === 國立彰化師範大學 === 工業教育學系 === 88 === This thesis first presents the implementation of developed stacked type piezoelectric actuators (PZT) via a novel developed digital battery charger device (DBCD). Secondly, the theoretical and experimental investigations of the piezoelectric micro actuation for high-speed motion are examined in this thesis. Battery charger system is developed for powering PZT and utilized for micro precision motion actuation. This power system without conventional transformer is constructed without the use of conventional coil and the use of high-frequency switching power design. Thirdly, emphasis placed here is on controlling and data acquisitioning of the characteristics of PZT via the developed technique of high speed, voltage-feedback-loop power amplifier with a paralleled capacitor. Experimental results demonstrate the high-speed step response of PZT can be achieved by this power system and theoretical simulations show the same results when developed PZT is disturbed by external load. Experimental results of PZT design illustrate the fast response of the battery charger device when the excitation dynamic force is range from 0 Hz to 500 Hz. Last, some cases of control algorithms are executed in real time experiments. The conventional P and PID controllers are experimental implemented successfully for the sub-micro positioning motion study. Linear internal model controller (IMC) algorithm is analytically new derived for this piezoelectric actuation system. Application of IMC by both numerical and experimental simulation shows that precise motion control of PZT is achieved.