Application of Soluble Polyimide in KrF Excimer Laser LIGA Process

Application of Soluble Polyimide in KrF Excimer Laser LIGA Process

碩士 === 國立清華大學 === 化學工程學系 === 88 ===

Bibliographic Details
Main Authors:	Guang-Yu Huang, 黃光宇
Other Authors:	Yu-Der Lee
Format:	Others
Language:	zh-TW
Published:	2000
Online Access:	http://ndltd.ncl.edu.tw/handle/40021054096977300443

Similar Items

KrF Excimer Laser on the Polyimide Surface Reaction Mechanism
by: Lin, Chih-Long, et al.
Published: (2013)

Study on photoresist applied in KrF excimer laser LIGA process
by: Wei-Chung Ma, et al.
Published: (1999)

Irradiation Study on GaN by 248 nm KrF Excimer Laser
by: Han-Yi Lu, et al.
Published: (2008)

Threshold Damage of Al film by 248 nm KrF Excimer Laser
by: Han-chun Tsao, et al.
Published: (2008)

The influence of KrF excimer laser irradiation on the surface of collagen and collagen/PVP films
by: M. Wisniewski, et al.
Published: (2006-01-01)

KrF Excimer Laser Recrystallization of Amorphous Silicon Thin Films for Solar Cells
by: Wen-Chuan Lin, et al.
Published: (2003)

The characteristics and feasibility of an in-line debris control technique for KrF excimer laser ablative micromachining
by: Dowding, Colin F.
Published: (2009)

Optical and Structural Properties of AgGaS2 Thin Films Prepared by KrF Excimer Laser
by: Hsu-Cheng Hsu, et al.
Published: (2000)

Krypton Gas for High Quality Single Wall Carbon Nanotubes Synthesis by KrF Excimer Laser Ablation
by: Jasim Al-Zanganawee, et al.
Published: (2015-01-01)

PZT thin film preparation by in-situ KrF excimer laser annealing and nano-powder seeding effect
by: Hsiu-Chuan Lee, et al.
Published: (2004)

Influence of KrF Excimer Laser Annealing on the Performance of InGaZnO Thin-Film Transistors
by: Chien-YuanLu, et al.
Published: (2013)

Characterization of KrF Excimer Laser Cured andThermally Cured Sol-gel ITO Thin Films
by: Wen-Chen Guo, et al.
Published: (2010)

Preparation of Ultrafine Fe–Pt Alloy and Au Nanoparticle Colloids by KrF Excimer Laser Solution Photolysis
by: Sugai Hiroshi, et al.
Published: (2009-01-01)

Ripple polystyrene nano-pattern induced by KrF laser
by: P. Slepicka, et al.
Published: (2014-07-01)

EFFECT OF OPTICAL FIBER HYDROGEN LOADING ON THE INSCRIPTION EFFICIENCY OF CHIRPED BRAGG GRATINGS BY MEANS OF KrF EXCIMER LASER RADIATION
by: Sergey V. Varzhel, et al.
Published: (2016-11-01)

Linear and Nonlinear Optical Properties of ZnSe Doped Glass Thin Films Grown by KrF Excimer Laser Deposition
by: Shue, Der-Yi, et al.
Published: (1998)

Study of Micro/Nano Structuring and Mechanical Properties of KrF Excimer Laser Irradiated Al for Aerospace Industry and Surface Engineering Applications
by: Umm-i-Kalsoom, et al.
Published: (2021-06-01)

Facile process to clean PMMA residue on graphene using KrF laser annealing
by: Hyeon Jun Hwang, et al.
Published: (2018-10-01)

Surface modification and mechanical reliability enhancement of free-standing single crystal silicon microstructures using localized KrF excimer laser annealing
by: Mitwally, Mohamed Elwi
Published: (2015)

Improvement of the spatial and temporal contrast of short-pulse KrF laser beams
by: Szatmári S., et al.
Published: (2013-11-01)

Active Stabilization of the Beam Pointing of a High- Power KrF Laser System
by: Barna1 A., et al.
Published: (2015-03-01)

Prepared Multilayer Superconducting Thin Film By Using KrF xcimer Pulsed Laser
by: Chen Shih-Pu, et al.
Published: (1994)

Reliability Investigation of APPECVD a-IGZO TFTs With LaAlO3 and ZrO2 Gate Dielectrics by KrF Excimer Laser Annealing
by: Sheng-Hsien Yang, et al.
Published: (2014)

KrF 雷射引發1,2-二氯乙烷光化學反應
by: SONG, GING-TIAN, et al.
Published: (1986)

Optical properties of GaSe thin films grown by KrF pulsed laser deposition
by: Hao-P''ing Cheng, et al.
Published: (2000)

Performance Investigation of LaAlO3/ZrO2/InGaZnO Thin Film Transistor Using KrF Excimer Laser Annealing
by: LI, CHENG-HUNG, et al.
Published: (2014)

Large Spectral Shift of Reflected Radiation From Laser Plasmas Generated by High Contrast KrF Laser Pulses
by: Zsolt Kovács, et al.
Published: (2020-09-01)

Advances on Polymer Optical Fiber Gratings Using a KrF Pulsed Laser System Operating at 248 nm
by: Carlos A. F. Marques, et al.
Published: (2018-03-01)

Monochromatic Conical IR Emission from Decaying KrF Laser Filaments in Xenon as Coherent Stimulated Four-Wave Mixing Process
by: Igor V. Smetanin, et al.
Published: (2021-02-01)

Effects of Pulsed KrF Laser Irradiation and Ion Implantation on the Growth and Properties of Liquid-Phase-Deposited SiO2
by: I-HSIANG KUO, et al.
Published: (2000)

Effects of Pulsed KrF Laser Annealing and Vacuum Annealing on (111) Preferred Orientantation, Microsturctures and Electrical Resistivity of the Copper Films
by: Yung Wei Shieh, et al.
Published: (1999)

Review of nonlinear effects under TW-power PS pulses amplification in GARPUN-MTW Ti:sapphire-KrF laser facility
by: V. D. Zvorykin, et al.
Published: (2020-07-01)

Study of Interfacial Reactions of Co/Si0.76Ge0.24/Si(100) by Pulsed KrF laser and Vacuum Annealing
by: Han, Yu-Lin, et al.
Published: (1998)

Study of Interfacial Reactions of Pd/Si0.76Ge0.24/Si(100) by Pulsed KrF Laser and Vacuum Annealinng
by: Chen, Da-Zen, et al.
Published: (1998)

Interfacial Reactions of Ti/Si0.76Ge0.24 with Various Thicknesses of the Interposed Mo layer by Pulsed KrF LaserAnnealing and Rapid Thermal Annealing
by: Jun-Jei Huang, et al.
Published: (1999)

Modeling of Kr-Xe discharge of excimer lamp
by: Belasri A., et al.
Published: (2013-03-01)

Light Output Improvement of Vertical-Structured GaN-Based Light-Emitting Diodes Using Hydrothermally Grown ZnO Nanowires and KrF Laser Etching
by: Ci-Keng Wu, et al.
Published: (2009)

Fabrication of SERS Active Surface on Polyimide Sample by Excimer Laser Irradiation
by: T. Csizmadia, et al.
Published: (2014-01-01)

Self-focusing of UV radiation in 1 mm scale plasma in a deep ablative crater produced by 100 ns, 1 GW KrF laser pulse in the context of ICF
by: V. D. Zvorykin, et al.
Published: (2020-05-01)

Refractive Microlens : Excimer Laser LIGA Fabrication and Optical Characterization
by: Chun-Ming Chen, et al.
Published: (2004)