| Summary: | 碩士 === 國立清華大學 === 材料科學工程學系 === 88 === Ultrasonic Spray Pyrolysis method has been employed in this study to deposit BaTiO3 thin film on ITO coated glass. Using Barium acetate [Ba(CH3COO)2], tetra titanium IV isoproxide (C12H28O4Ti) and distilled water as reactants. Deposition temperature fix at 250℃.
Major experimential processing parameters include solution concentration (0.03M,0.04M,0.05M and 0.06M), annealing temperature ( 550℃,600℃,650℃ and 700℃ ), annealing time ( 30min, 60min and 120min) and de- position time (120 min, 150min and 180min) are varied to investigate their effect on film thickness, crystal structure, optical properties (transmission and energy band) and electrical properties ( C, I-V, and P-E measurements ) in order to obtain the best processing condition for future application.
Experimental results reveal that annealing temperature is an important role in the crystalline of BaTiO3 thin films. BaTiO3 films on ITO coated glass have highly transmission in the spectral range from 400 to 1100 nm. Dielectric constant, leaking current and remanent polarition are 234, 1.19x10-5 A/cm2 and 0.96μC/cm2 when annealing temperature is 650℃, annealing time is 120 min.
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