The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology

The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology

碩士 === 國立清華大學 === 工程與系統科學系 === 88 ===

Bibliographic Details
Main Authors: Chun-Jun Lin, 林俊仁
Other Authors: Chih-Hao Lee
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/46106431061944128481
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spelling ndltd-TW-088NTHU05930392016-07-08T04:23:17Z http://ndltd.ncl.edu.tw/handle/46106431061944128481 The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology 應用反應離子深刻技術之光學微位移感測器製程之研究 Chun-Jun Lin 林俊仁 碩士 國立清華大學 工程與系統科學系 88 Chih-Hao Lee Fan-Gang Tseng 李志浩 曾繁根 2000 學位論文 ; thesis 79 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 工程與系統科學系 === 88 ===
author2 Chih-Hao Lee
author_facet Chih-Hao Lee
Chun-Jun Lin
林俊仁
author Chun-Jun Lin
林俊仁
spellingShingle Chun-Jun Lin
林俊仁
The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology
author_sort Chun-Jun Lin
title The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology
title_short The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology
title_full The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology
title_fullStr The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology
title_full_unstemmed The Fabrication Process Research of Optical Micro Displacement Sensor Using Deep Silicon RIE Technology
title_sort fabrication process research of optical micro displacement sensor using deep silicon rie technology
publishDate 2000
url http://ndltd.ncl.edu.tw/handle/46106431061944128481
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AT línjùnrén fabricationprocessresearchofopticalmicrodisplacementsensorusingdeepsiliconrietechnology
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